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Nikon Digimicro- MH-12-MPM

  1. Resolution: 1-10 nm
  2. Travel range: 12 mm
  3. Repeatability: 200 nm
  4. Accuracy: +/- 350 nm across full travel range.

Nikon Digimicro- MF-501-MPM

  1. Resolution: 1-10 nm
  2. Travel range: 50 mm
  3. Repeatability: 500 nm
  4. Accuracy: +/-500 nm across full travel range.

Nikon Digimicro- MF-1001-MPM

  1. Resolution: 1-10 nm
  2. Travel range: 100 mm
  3. Repeatability: 500 nm
  4. Accuracy: +/-1.5 micron across full travel range.

Nikon Absolute Linear Encoder- SAL-S40N

  1. Resolution: 58.59 nm
  2. Travel range: 32 mm

A-Quad-B Digital Encoders

  1. MPM300 is also compatible with many position encoders with A-Quad-B digital output.
  2. Example encoders include Renishaw RJH series encoder.

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The MPM300 is a high precision motion processing engine capable of obtaining nanometer measurement accuracy. The MPM300 interfaces with a variety of precision Linear, Rotary, and recently introduced Absolute Encoders, made by Nikon. NanoWave’s close collaboration with Nikon resulted in the MPM300 product to provide complete support for Nikon’s DigiMicro encoder products.

Some of MPM’s digital signal processing architecture was borrowed from NanoWave's patented Scanning Probe Position Encoder (SPPE) technology called NanoRES™ which offers many advantages over other encoding methods. NanoWave has taken advantage of the emerging high density FPGA’s (Field Programmable Gate Arrays) to implement its proprietary DSP (Digital Signal Processor) algorithms. Utilizing FPGA technology, these algorithms can be easily refined and updated to meet fulfil the requirements of more demanding systems.

Block Diagram

Unlike conventional DSP processors, FPGA technology allows many parallel signal processing paths which greatly speeds up real-time signal processing. It is for this reason the MPM300 can process position data at 40MHz rates with uncanny accuracy which makes it ideal for machine control.

Example Applications

  1. Create custom nanopositioning stage with MPM300-Digimicro Position Encoder System
  2. Build calibration tools with MPM300-Digimicro Position Encoder System

More MPM300 information at NanoWave technical blog.

NanoWave SPPE technology is also available today for licensing. See Technology Licensing.