DigiMicro Family Overview
DigiMicro Encoders for Motion Control
DigiMicro Gauges & Accessories
DigiMicro Family Specifications

Nanowave has worked with Nikon Corp to bring out special versions of their DigiMicro products suitable as position encoders for high-precision motion control. NanoWave is also an authorized North American distributor for the entire family of Nikon's DigiMicro gauges and accessories.

Underlying both versions of DigiMicro products is the same high-quality and widely respected Nikon encoder technology. These are sealed, linear optical encoders using a glass diffraction grating scale attached to a spring loaded plunger. Both versions provide exceptionally high linearity, repeatability and accuracy.

Applications

  • Motion Control
  • Laboratory Instruments
  • Medical Equipment
  • Robotics
  • Industrial Automation
  • Milling Machines
  • Semiconductor Equipment

Features

  • Nanometer Precision
  • Quick and Easy Integration
  • Highly Reliable and Durable
  • Greater than 1M Cycle operation
  • Standard A Quad B Output
  • Rugged Extruded Aluminum Enclosures

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The new versions of DigiMicro encoders for use in motion control systems are:

 

These optical linear encoder heads are used with a specially developed MPM300-OEM Motion Processing Module, providing nanometer resolution and the performance required for motion control.

The very compact MH-12M was originally developed exclusively for use in Nikon's world-renowned semi-conductor lithography (or known as "stepper") systems. All of these encoders use a 5 Volt supply voltage, which is supplied by the MPM300.

Compared to other exposed optical encoders, DigiMicro encoders are more reliable and accurate for applications in dusty or dirty environments since the encoders are sealed. Even in clean environments, accuracy is improved because the alignment of the scale to the read-head is done at the factory and tested for conformance. Installation of these encoders in a motion system is also easier, while also allowing high-precision configurations not possible with other traditional exposed encoders.

Users only need to have the mechanical plunger pushed against a stable and low friction target. This enables users to get nano-motion operation started quickly from the day they receive the products. Since the plunger can be aligned with the metrology plane of the stage or sample, it is also possible to greatly reduce Abbe errors. Two and three dimensional (XY and XYZ) configurations are also easy to construct using multiple Nikon DigiMicro Encoders, where each encoder is aligned along the metrology plane.

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MH12M-MPM (12mm travel range)

MF501-MPM (50 mm travel range)

MF1001-MPM (100mm travel range)

Digimicro_app

DigiMicro Configuration for Motion Control with Single Axis Stage

MPM_Conn

All Digimicro MPM series come with one click connection to MPM300



While these high quality precision measurement instruments are used extensively throughout Japan and Asia, setting the measurement standard for accuracy, they are relatively new in the North American market.

The DigiMicro gauges offered by NanoWave for the North American market include:

 

  • MF-501 (with 50 mm travel)
  • MF-1001 (with 100 mm travel)

These encoder/gauge heads are used with either the Nikon TC-101 or the MFC-101 interpolator-counter which also provide a human digital read-out and come with their own 12 VDC power supply (Important: MF-501 and MF1001 are therefore not compatible with MPM300).

TC-101 provides resolution down to 10 nm. The MFC-101 provides resolution down to 100 nm. (Please note: These interpolator-counters work only with the 12 Volt versions of MF-501 and MF-1001.)

Please download our DigiMicro Brochure , which also includes the specifications for the encoder and interpolators, and mechanical drawings for the encoder/gauge heads.

Also available from NanoWave are a variety of other DigiMicro accessories. These include several different types of probe tips which attach to the end of the plunger, as well as granite and ceramic base stands with a perpendicular mount for the encoder / gauge head.

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MF1001 (100mm travel range) with TC-101

MFC101

MF501 (50mm travel range) with MFC-101

DigiMicro Encoder Heads

 

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